SINGLE-CRYSTAL SILICON HIGH-Q TORSIONAL OSCILLATORS

被引:106
作者
KLEIMAN, RN
KAMINSKY, GK
REPPY, JD
PINDAK, R
BISHOP, DJ
机构
关键词
D O I
10.1063/1.1138425
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:2088 / 2091
页数:4
相关论文
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