MICROMACHINING OF SILICON MECHANICAL STRUCTURES

[1] HIGH-RESOLUTION ELECTRON-BEAM LITHOGRAPHY ON THIN-FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1743 - 1748

[2] AGNOLET G, 1984, B AM PHYS SOC, V29, P223

[3] FABRICATION OF NOVEL 3-DIMENSIONAL MICROSTRUCTURES BY ANISOTROPIC ETCHING OF (100) AND (110) SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1178 - 1185

[4] FABRICATION OF HIGH PRECISION NOZZLES BY ANISOTROPIC ETCHING OF (100) SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (08) : 1321 - 1327

[5] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[6] BISHOP D, UNPUB ELASTIC CONSTA

[7] BISHOP D, UNPUB MECHANICAL MEA

[8] BOHG A, 1971, J ELECTROCHEM SOC, V2, P401

[9] PREPARATION OF LARGE-AREA MONO-CRYSTALLINE SILICON THIN WINDOWS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1980, 51 (09) : 1212 - 1216

[10] LATERAL DIFFUSION OF BORON IN POLYCRYSTALLINE SILICON AND ITS INFLUENCE ON FABRICATION OF SUB-MICRON MOSTS [J]. SOLID-STATE ELECTRONICS, 1977, 20 (12) : 985 - 992

[1] HIGH-RESOLUTION ELECTRON-BEAM LITHOGRAPHY ON THIN-FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1743 - 1748

[2] AGNOLET G, 1984, B AM PHYS SOC, V29, P223

[3] FABRICATION OF NOVEL 3-DIMENSIONAL MICROSTRUCTURES BY ANISOTROPIC ETCHING OF (100) AND (110) SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1178 - 1185

[4] FABRICATION OF HIGH PRECISION NOZZLES BY ANISOTROPIC ETCHING OF (100) SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (08) : 1321 - 1327

[5] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[6] BISHOP D, UNPUB ELASTIC CONSTA

[7] BISHOP D, UNPUB MECHANICAL MEA

[8] BOHG A, 1971, J ELECTROCHEM SOC, V2, P401

[9] PREPARATION OF LARGE-AREA MONO-CRYSTALLINE SILICON THIN WINDOWS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1980, 51 (09) : 1212 - 1216

[10] LATERAL DIFFUSION OF BORON IN POLYCRYSTALLINE SILICON AND ITS INFLUENCE ON FABRICATION OF SUB-MICRON MOSTS [J]. SOLID-STATE ELECTRONICS, 1977, 20 (12) : 985 - 992