PREPARATION OF LARGE-AREA MONO-CRYSTALLINE SILICON THIN WINDOWS

被引：46

作者：

CHEUNG, NW ^{[1
]}

机构：

[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1980年 / 51卷 / 09期

关键词：

D O I：

10.1063/1.1136404

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：1212 / 1216

页数：5

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