PREPARATION OF BA2NANB5O15 FILM BY RF MAGNETRON SPUTTERING METHOD

被引：25

作者：

MASUDA, Y ^{[1
]}

MASUMOTO, H ^{[1
]}

BABA, A ^{[1
]}

GOTO, T ^{[1
]}

HIRAI, T ^{[1
]}

机构：

[1] TOHOKU UNIV,INST MAT RES,SENDAI,MIYAGI 980,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 9B期

关键词：

TUNGSTEN-BRONZE STRUCTURE; BA2NANB5O15; FERROELECTRIC; RF MAGNETRON SPUTTERING; PT ELECTRODE; FILM THICKNESS; ORTHORHOMBIC-TETRAGONAL PHASE TRANSITION;

D O I：

10.1143/JJAP.32.4043

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A film with tungsten-bronze structure was formed on a Pt/Al2O3 substrate by a RF msagnetron sputtering method. The deposition ratio of the films (Ba:Na:Nb) depended on the sputtering gas pressure. When the deposition rates were 10 nm/min at 10(-1) Pa and 5 nm/min at 8 Pa, the dielectric constant and the dielectric loss factor were 141 and 0.02 at room temperature, respectively, and the remanent polarization P(r) and the coercive field E(c) were 32 muC/cm2 and 576 V/mm, respectively.

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页码：4043 / 4047

页数：5

相关论文

共 12 条

[1] NONLINEAR OPTICAL PROPERTIES OF BA2NANB5O15 [J].

GEUSIC, JE ;

LEVINSTE.HJ ;

RUBIN, JJ ;

SINGH, S ;

VANUITER.LG .

APPLIED PHYSICS LETTERS, 1967, 11 (09) :269-&

[2] CONTINUOUS 0.532-MU SOLID-STATE SOURCE USING BA2NANB5O15 [J].

GEUSIC, JE ;

LEVINSTEIN, HJ ;

SINGH, S ;

SMITH, RG ;

VANUITER.LG .

APPLIED PHYSICS LETTERS, 1968, 12 (09) :306-+

[3] ALKALI STRONTIUM-BARIUM-LEAD NIOBATE SYSTEMS WITH A TUNGSTEN BRONZE STRUCTURE - CRYSTALLOGRAPHIC PROPERTIES AND CURIE POINTS [J].

GIESS, EA ;

SCOTT, BA ;

BURNS, G ;

OKANE, DF ;

SEGMULLER, A .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1969, 52 (05) :276-+

[4] MEASUREMENTS OF SECOND-HARMONIC GENERATION AND VARIATIONS IN FREE AND CLAMPED VALUES OF DIELECTRIC-CONSTANTS AND ELECTROOPTIC COEFFICIENTS IN BARIUM SODIUM NIOBATE [J].

NASH, FR ;

DZIEDZIC, JM ;

TURNER, EH ;

BRIDENBAUGH, PM .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (01) :1-+

[5] CHARACTERISTICS OF BA2NANB5O15 FOR OPTICAL SWITCHING AND HARMONIC GENERATION [J].

RICE, RR ;

FAY, H ;

DESS, HM ;

ALFORD, WJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (06) :839-&

[6]

SCOTT BA, 1969, MATER RES B, V2

[7] OPTICAL AND FERROELECTRIC PROPERTIES OF BARIUM SODIUM NIOBATE [J].

SINGH, S ;

DRAEGERT, DA ;

GEUSIC, JE .

PHYSICAL REVIEW B, 1970, 2 (07) :2709-&

[8] GROWTH OF BA2NANB5O15 SINGLE CRYSTALS FOR OPTICAL APPLICATIONS [J].

VANUITERT, LG ;

RUBIN, JJ ;

BONNER, WA .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1968, QE 4 (10) :622-+

[9] SOME CHARACTERISTICS OF NIOBATES HAVING FILLEDTETRAGONAL TUNGSTEN BRONZE-LIKE STRUCTURES [J].

VANUITERT, LG ;

LEVINSTEIN, HJ ;

RUBIN, JJ ;

CAPIO, CD ;

DEARBORN, EF ;

BONNER, WA .

MATERIALS RESEARCH BULLETIN, 1968, 3 (01) :47-+

[10] PIEZOELECTRIC PROPERTIES OF BA2NANB5O15 [J].

WARNER, AW ;

COQUIN, GA ;

MEITZLER, AH ;

FINK, JL .

APPLIED PHYSICS LETTERS, 1969, 14 (01) :34-+