FABRICATION OF SUB-MICRON CROSSED SQUARE-WAVE GRATINGS BY DRY ETCHING AND THERMOPLASTIC REPLICATION TECHNIQUES

被引:27
作者
LEHMANN, HW [1 ]
WIDMER, R [1 ]
EBNOETHER, M [1 ]
WOKAUN, A [1 ]
MEIER, M [1 ]
MILLER, SK [1 ]
机构
[1] SWISS FED INST TECHNOL,PHYS CHEM LAB,CH-8092 ZURICH,SWITZERLAND
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期
关键词
D O I
10.1116/1.582747
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1207 / 1210
页数:4
相关论文
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