FABRICATION OF SUB-MICRON CROSSED SQUARE-WAVE GRATINGS BY DRY ETCHING AND THERMOPLASTIC REPLICATION TECHNIQUES

被引：27

作者：

LEHMANN, HW ^{[1
]}

WIDMER, R ^{[1
]}

EBNOETHER, M ^{[1
]}

WOKAUN, A ^{[1
]}

MEIER, M ^{[1
]}

MILLER, SK ^{[1
]}

机构：

[1] SWISS FED INST TECHNOL,PHYS CHEM LAB,CH-8092 ZURICH,SWITZERLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期

关键词：

D O I：

10.1116/1.582747

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1207 / 1210

页数：4

共 8 条

[1]

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[7] RADIATION DAMPING IN SURFACE-ENHANCED RAMAN-SCATTERING [J].

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[8] ENERGY-TRANSFER IN SURFACE ENHANCED LUMINESCENCE [J].

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