INVESTIGATION OF PHASE GROWTH KINETICS IN SYSTEM OF SI SINGLE-CRYSTALS AND 5 THIN-FILMS

被引:5
作者
FOMIN, BI [1 ]
GERSHINSKII, AE [1 ]
CHEREPOV, EI [1 ]
EDELMAN, FL [1 ]
机构
[1] ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1976年 / 36卷 / 01期
关键词
D O I
10.1002/pssa.2210360168
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:K89 / K91
页数:3
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