CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY STUDY OF OBLIQUELY EVAPORATED SILICON-OXIDE THIN-FILMS

被引：11

作者：

GESZTI, O ^{[1
]}

GOSZTOLA, L ^{[1
]}

SEYFRIED, E ^{[1
]}

机构：

[1] MEV,ENTERPRISE MICROELECTR,H-1325 BUDAPEST,HUNGARY

来源：

THIN SOLID FILMS | 1986年 / 136卷 / 02期

关键词：

D O I：

10.1016/0040-6090(86)90292-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L35 / L38

页数：4

共 9 条

[1]

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[3] TILT ANGLE MEASUREMENTS OF NEMATIC PHASES OF CYANO-BIPHENYLS ALIGNED BY OBILQUELY EVAPORATED-FILMS [J].

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[4]

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[5] THIN-FILM SURFACE ORIENTATION FOR LIQUID-CRYSTALS [J].

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[6] TOPOLOGY OF OBLIQUELY COATED SILICON MONOXIDE LAYERS [J].

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ADAMS, JE .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (02) :831-833

[7] THE TEMPERATURE-DEPENDENCE OF LIQUID-CRYSTAL TILT ANGLES [J].

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AARTSEN, RG .

JOURNAL OF APPLIED PHYSICS, 1984, 56 (02) :251-262

[8]

WADE RH, 1967, PHYS STATUS SOLIDI, V19, P63, DOI 10.1002/pssb.19670190107

[9]

YAMASHITA M, 1976, JPN J APPL PHYS, V15, P2087, DOI 10.1143/JJAP.15.2087

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