ACOUSTIC INSITU MONITORING OF EXCIMER-LASER ABLATION OF DIFFERENT CERAMICS

被引：39

作者：

GRAD, L

MOZINA, J

机构：

[1] Faculty of Mechanical Engineering, University of Ljubljana, 61000 Ljubljana

来源：

APPLIED SURFACE SCIENCE | 1993年 / 69卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(93)90536-K

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Measurements of excimer laser generated acoustic transients were performed both on the back surface of various ceramic samples and in the surrounding gas. Several techniques of acoustic signal analysis were used to study the correlation between acoustic signal parameters and the ablation rate. The technique based on the defined ablation parameter E(s) is proved to be suitable for monitoring the excimer laser ablation processes.

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页码：370 / 375

页数：6

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