AN E-BEAM DIRECT WRITE PROCESS FOR 16M-BIT DRAMS

被引：4

作者：

NOMURA, N

KAWAKITA, K

HIRAI, Y

SAKASHITA, T

HARAFUJI, K

HASHIMOTO, K

KOIZUMI, T

HAMAGUCHI, H

MISAKA, A

TAKEMOTO, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 12期

关键词：

D O I：

10.1143/JJAP.28.2615

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2615 / 2623

页数：9

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