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OPTICAL AND ELECTRONIC-PROPERTIES OF THE ELECTRON-BEAM RESIST POLY(BUTENE-1-SULFONE)

被引：11
作者：
WILLIAMS, MW
YOUNG, DW
ASHLEY, JC
ARAKAWA, ET
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 11期
关键词：
D O I：
10.1063/1.335525
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：4360 / 4364
页数：5
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