REAL-TIME FEEDBACK FOR SIDEWALL PROFILE CONTROL IN REACTIVE ION ETCHING

被引：9

作者：

RASHAP, B

FREUDENBERG, J

ELTA, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期

关键词：

D O I：

10.1116/1.579770

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1792 / 1796

页数：5

共 11 条

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