ZIRCONIUM ACETYLACETONATE AS A PRECURSOR FOR THE CHEMICAL-VAPOR DEPOSITION OF ZRO2

被引：6

作者：

DZJUBENKO, N ^{[1
]}

MARTYNENKO, L ^{[1
]}

ZHARKOVA, N ^{[1
]}

GAVRISCHUK, E ^{[1
]}

GIBIN, A ^{[1
]}

机构：

[1] INST HIGHLY PURE SUBSTANCES,NOVGOROD 603445,RUSSIA

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1993年 / 18卷 / 03期

关键词：

D O I：

10.1016/0921-5107(93)90138-D

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The coevaporation effect of a zirconium acetylacetonate (ZrA4)-YA3-3H2O mixture has been used to increase the amount of yttrium complex in the gaseous phase. The kinetic parameters of ZrO2 film deposition with ZrA4 as a precursor are calculated.

引用

页码：232 / 233

页数：2