PRECIPITATION AS THE PHENOMENON RESPONSIBLE FOR THE ELECTRICALLY INACTIVE PHOSPHORUS IN SILICON

被引：110

作者：

NOBILI, D

ARMIGLIATO, A

FINETTI, M

SOLMI, S

机构：

来源：

关键词：

D O I：

10.1063/1.330646

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1484 / 1491

页数：8

共 34 条

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