ELECTRICAL-PROPERTIES AND STABILITY OF SUPERSATURATED PHOSPHORUS-DOPED SILICON LAYERS

被引：56

作者：

FINETTI, M

NEGRINI, P

SOLMI, S

NOBILI, D

机构：

来源：

关键词：

D O I：

10.1149/1.2127626

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1313 / 1317

页数：5

共 23 条

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