MASS-SPECTROMETRIC INVESTIGATION OF GAS SWITCHING IN AN INGAASP MOVPE SYSTEM

被引：12

作者：

HASPEKLO, H ^{[1
]}

KONIG, U ^{[1
]}

HEYEN, M ^{[1
]}

JURGENSEN, H ^{[1
]}

机构：

[1] AIXTRON GMBH,D-5100 AACHEN,FED REP GER

来源：

JOURNAL OF CRYSTAL GROWTH | 1986年 / 77卷 / 1-3期

关键词：

D O I：

10.1016/0022-0248(86)90285-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：79 / 84

页数：6

相关论文

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