RF SPUTTERED THIN-FILMS FOR INTEGRATED OPTICAL COMPONENTS

被引：30

作者：

PITT, CW ^{[1
]}

GFELLER, FR ^{[1
]}

STEVENS, RJ ^{[1
]}

机构：

[1] UCL, DEPT ELECTR & ELECT ENGN, TORRINGTON PL, LONDON WC1E 7JE, ENGLAND

来源：

THIN SOLID FILMS | 1975年 / 26卷 / 01期

关键词：

D O I：

10.1016/0040-6090(75)90165-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：25 / 51

页数：27

共 28 条

[1]

ASH EA, 1972, FEB INT INT OPT C LA

[2]

Beckman P., 1963, SCATTERING ELECTROMA

[3] THEORY AND PRACTICE OF RF SPUTTERING [J].

DAVIDSE, PD .

VACUUM, 1967, 17 (03) :139-&

[4]

GALI G, 1970, APPL PHYS LETT, V16, P439

[5]

GARBUNY M, 1965, OPTICAL PHYSICS

[6] COLINEAR ACOUSTOOPTIC DEFLECTION IN THIN-FILMS [J].

GFELLER, FR ;

PITT, CW .

ELECTRONICS LETTERS, 1972, 8 (22) :549-&

[7] INTEGRATED OPTICAL CIRCUITS [J].

GOELL, JE ;

STANDLEY, RD .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1970, 58 (10) :1504-+

[8]

GOELL JE, 1970, ELECTRONICS MAG 0831, P60

[9]

GOLDBERG P, 1966, LUMINESCENCE INORGAN, pCH8

[10] LOW-LOSS EPITAXIAL ZNO OPTICAL WAVEGUIDES [J].

HAMMER, JM ;

WITTKE, JP ;

DUFFY, MT ;

CHANNIN, DJ .

APPLIED PHYSICS LETTERS, 1972, 21 (08) :358-&

← 1 2 3 →