THE EFFECT OF OFF-AXIS SI(100) SUBSTRATES ON THE DEFECT STRUCTURE AND ELECTRICAL-PROPERTIES OF BETA-SIC THIN-FILMS

被引：47

作者：

KONG, HS

WANG, YC

GLASS, JT

DAVIS, RF

机构：

来源：

JOURNAL OF MATERIALS RESEARCH | 1988年 / 3卷 / 03期

关键词：

D O I：

10.1557/JMR.1988.0521

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：521 / 530

页数：10

共 32 条

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