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APPLICATIONS OF MAGNETIC FORCE MICROSCOPY IN MAGNETIC STORAGE DEVICE MANUFACTURING

被引：11
作者：
PERSCH, G
STRECKER, H
机构：
[1] Laboratories, IBM Plant Mainz
来源：
ULTRAMICROSCOPY | 1992年 / 42卷
关键词：
D O I：
10.1016/0304-3991(92)90434-L
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
For magnetic storage device manufacturing the still increasing bit densities demand always stronger requirements to the process characterization tools. Of particular interest is the detailed characterization of the microtopography and magnetic morphology of storage device components. Magnetic force microscopic (MFM) investigations have been performed on thin-film discs with low and high bit densities. The influence of the surface topography on the magnetic structures will be presented. Another technical application of the magnetic force microscope is the analysis of inductive thin-film heads. Combined atomic force and magnetic force investigation will be shown.
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收藏
页码：1269 / 1274
页数：6
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