X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF PHOSPHORUS INCORPORATION IN ANODIC OXIDE-FILMS ON NIOBIUM

被引：22

作者：

JOUVE, J

BELKACEM, Y

SEVERAC, C

机构：

来源：

THIN SOLID FILMS | 1986年 / 139卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90049-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：67 / 75

页数：9

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[6] QUANTITATIVE-EVALUATION OF THE ION-BEAM EFFECT DURING SPUTTERING OF OXIDE LAYERS USING AES AND XPS [J].

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