PREPARATION OF LA-MODIFIED PBTIO3 THIN-FILMS ON THE OXIDE BUFFER LAYERS WITH NACL-TYPE STRUCTURE

被引:26
作者
FUJII, S
TOMOZAWA, A
FUJII, E
TORII, H
TAKAYAMA, R
HIRAO, T
机构
[1] Central Research Laboratories, Matsushita Electric Industrial Co., Ltd., Kyoto 619-02, Hikaridai, Seikacho
关键词
D O I
10.1063/1.112016
中图分类号
O59 [应用物理学];
学科分类号
摘要
La-modified PbTiO3(PLT: Pb0.9La0.1Ti0.975O3) thin films by rf magnetron sputtering were prepared on the preferred (100)-oriented oxide buffer layers with NaCl-type structure, which were prepared by plasma-enhanced metalorganic chemical vapor deposition. Fused silica, (111)Si, soda-lime glass, and stainless steel were used as the substrates to prepare the oxide buffer layers. The c-axis and a-axis preferred oriented PLT thin films were obtained on the buffer layer, independent of the kind of substrate. Further, highly c-axis oriented PLT thin films were obtained when the substrate had a large thermal expansion coefficient. Significant pyroelectric currents were detected without a poling treatment. The NiCr/PLT/(100)Pt/(100)MgO/stainless steel structure had a dielectric constant of 250, a dielectric loss factor tan delta of 0.8%, and a pyroelectric coefficient of 3.8 X 10(-4) C/M2 K.
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页码:1463 / 1465
页数:3
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