SURFACE PROFILING USING THE PHOTOTHERMAL DISPLACEMENT METHOD

被引：3

作者：

UMEDA, N

ITOH, K

机构：

[1] Department of Mechanical Systems Engineering, Tokyo University of Agriculture and technology, Koganei, 184

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 07期

关键词：

Deflection; Laser; Photothermal displacement; Profilometry; Thermal expansion;

D O I：

10.1143/JJAP.29.L1206

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper describes a surface profile measurement by the photothermal displacement method. This technique is based on the thermal expansion of a sample absorbing a pumping beam and on the change in the deflection of a reflected probe beam due to the slope of displacement. A vertical resolution of about 0.1 µm is experimentally obtained. The surface profile measurement of a Mn-Zn ferrite magnetic head is demonstrated. © 1990 The Japan Society of Applied Physics.

引用

页码：L1206 / L1208

页数：3

共 7 条

[1] PHOTOTHERMAL MEASUREMENTS USING A LOCALIZED EXCITATION SOURCE [J].