PYROLYSIS AND LASER ABLATION OF PLASMA-POLYMERIZED FLUOROCARBON FILMS - EFFECTS OF GOLD PARTICLES

被引:9
作者
CREASY, WR
ZIMMERMAN, JA
JACOB, W
KAY, E
机构
[1] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,W-8046 GARCHING,GERMANY
[2] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120
关键词
D O I
10.1063/1.351592
中图分类号
O59 [应用物理学];
学科分类号
摘要
Plasma-polymerized fluorocarbon (PPFC) films were analyzed by thermogravimetric analysis (TGA), direct pyrolysis/mass spectrometry, and laser-ablation/electron-impact mass spectrometry. Fourier transform mass spectrometry was used to detect products. The films were made by plasma polymerizing tetrafluoroethylene in an argon plasma. Two types of films were studied: with and without fine gold particles incorporated in the PPFC films. TGA showed that gold-containing films decompose more rapidly and at lower temperature with increasing gold content. Pyrolysis products were determined as a function of temperature. The predominant positive product ions, using 20 eV electron-impact ionization, were C2F4+, CF3+ and a distribution of higher-mass unsaturated fluorocarbon species, CnFm+, up to at least n = 14 and m greater-than-or-equal-to n + 1. The predominant negative ions, formed by electron attachment, were also unsaturated fluorocarbon ions which extended up to 1145 u in mass. These species are different from those observed from polytetrafluoroethylene pyrolysis. No dependence of the positive-ion mass spectral distributions of pyrolysis products on gold content of the films was observed. However, the negative-ion pyrograms had a dramatically different temperature dependence for films with and without gold. The results imply that the gold-containing films have regions of lower molecular weight, and a possible formation mechanism is suggested. Laser ablation formed low-mass neutral fluorocarbon species. Ablation of the gold-containing film under direct laser ionization conditions (higher laser power), produced a spectrum resembling the pyrolysis spectrum, suggesting that the gold particles affect the mechanism of the ablation.
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页码:2462 / 2471
页数:10
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