A SIMPLE FORMULA FOR LOW-ENERGY SPUTTERING YIELDS

被引：44

作者：

STEINBRUCHEL, C

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1985年 / 36卷 / 01期

关键词：

D O I：

10.1007/BF00616458

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：37 / 42

页数：6

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