DEPOSITION PROCESS AND SOME CHARACTERISTICS OF TIS2 PREPARED BY PLASMA CVD

Crystallite size of the product was affected by an applied RF-power in the plasma CVD of TiS2 in the reactant system of TiCl4 and H2S. Unexpectedly large discharge capacity was observed on a lithium battery by using TiS2 thin film prepared at RF-power of 15 W, which is the smallest value to sustain a stable plasma. Mass spectroscopy was applied to investigate gaseous species in the CVD reaction by varing RF-power. Reactants, TiCl4 and H2S were not broken into their fragments, but were excited to initiate a polymerization for TiS2. Transmission electron micrograph showed that the present TiS2 crystals are highly defective. These defects may contribute to the large capacity of the lithium battery. © 1990.