ASPHERICAL SURFACE TESTING WITH SHEARING INTERFEROMETER USING FRINGE SCANNING DETECTION METHOD

被引:42
作者
YATAGAI, T [1 ]
KANOU, T [1 ]
机构
[1] RICOH CO LTD, TOKYO 143, JAPAN
关键词
D O I
10.1117/12.7973300
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
14
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收藏
页码:357 / 360
页数:4
相关论文
共 14 条
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