DAMAGE EFFECTS OF ION ATOM BEAM MILLING ON MNOS (AL/SI3N4/SIO2/SI) CAPACITORS

被引：1

作者：

BANGERT, U

BELSON, J

WILSON, IH

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(84)90093-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：370 / 373

页数：4

共 7 条

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[2]

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[4]

HEMMENT PLF, 1977, I PHYS C SER, V38, P117

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GROVE, AS ;

FITZGERALD, DJ .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1967, 55 (07) :1168-+

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STEIN, HJ .

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YUN, BH .