AN OPEN TUBE METHOD OF ZN DIFFUSION IN III-V-COMPOUNDS

被引：19

作者：

PHATAK, SB

机构：

来源：

ELECTRON DEVICE LETTERS | 1982年 / 3卷 / 05期

关键词：

D O I：

10.1109/EDL.1982.25511

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：132 / 134

页数：3

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