A NEW APPARATUS FOR MULTILAYER GROWTH BY CHEMICAL VAPOR-DEPOSITION - THE SLIDING-BOAT CLOSE-SPACED TECHNIQUE

被引：3

作者：

YOSHIKAWA, A

YOSHIHARA, S

KASAI, H

NISHIMAKI, M

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 08期

关键词：

D O I：

10.1063/1.92062

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：732 / 734

页数：3

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