METAL-CONTAINING PLASMA-POLYMERIZED FILMS

被引：21

作者：

ASANO, Y

机构：

来源：

THIN SOLID FILMS | 1983年 / 105卷 / 01期

关键词：

D O I：

10.1016/0040-6090(83)90324-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1 / 8

页数：8

共 15 条

[1]

ASAI S, 1970, 2 P C SOL STAT DEV, P172

[2]

ASANO Y, UNPUB

[3]

ASANO Y, 1981, SID 81, P70

[4] POLYMER-METAL COMPOSITE FILMS [J].

BOONTHANOM, N ;

WHITE, M .

THIN SOLID FILMS, 1974, 24 (02) :295-306

[5] RAPID REVERSIBLE LIGHT-INDUCED CRYSTALLIZATION OF AMORPHOUS SEMICONDUCTORS [J].

FEINLEIB, J ;

DENEUFVILLE, J ;

MOSS, SC ;

OVSHINSKY, SR .

APPLIED PHYSICS LETTERS, 1971, 18 (06) :254-+

[6] The measurement of particle size by the X-ray method [J].

Jones, FW .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1938, 166 (A924) :0016-0043

[7] PLASMA POLYMERIZATION OF FLUOROCARBONS IN RF CAPACITIVELY COUPLED DIODE SYSTEM [J].

KAY, E ;

DILKS, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (01) :1-11

[8]

KAY E, 1979, J MACROMOL SCI CHEM, V12, P1393

[9]

KISSINGER HE, 1957, ANAL CHEM, V29, P1702, DOI DOI 10.1021/AC60131A045

[10] INTERFACE COMPOSITION AND ADHESION OF GLOW-DISCHARGE-FORMED ORGANOTIN POLYMERS [J].

KNY, E ;

LEVENSON, LL ;

JAMES, WJ ;

AUERBACH, RA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :359-362

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