GROWTH OF EPITAXIAL SILICA ON VICINAL SI(001) SURFACES DURING THERMAL-OXIDATION IN O-2

被引：32

作者：

ROCHET, F

FROMENT, M

DANTERROCHES, C

ROULET, H

DUFOUR, G

机构：

[1] UNIV PIERRE & MARIE CURIE,CNRS,LPIS,TOUR 22 4 PL JUSSIEU,F-75252 PARIS 05,FRANCE

[2] UNIV PARIS 07,ECOLE NORMALE SUPER,PHYS SOLIDES GRP,F-75251 PARIS 05,FRANCE

[3] CTR NATL ETUD TELECOMMUN,F-38243 MEYLAN,FRANCE

[4] UNIV PIERRE & MARIE CURIE,CNRS,CHIM PHYS LAB 176,F-75231 PARIS 05,FRANCE

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1989年 / 59卷 / 03期

关键词：

D O I：

10.1080/13642818908220183

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：339 / 363

页数：25

共 22 条

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