LIQUID TRANSPORT IN MICRON AND SUBMICRON CHANNELS

被引:131
作者
PFAHLER, J
HARLEY, J
BAU, H
ZEMEL, J
机构
[1] UNIV PENN,DEPT ELECT ENGN,PHILADELPHIA,PA 19104
[2] UNIV PENN,CTR SENSOR TECHNOL,PHILADELPHIA,PA 19104
基金
美国国家科学基金会;
关键词
D O I
10.1016/0924-4247(89)80008-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An experimental investigation of fluid flow in extremely small channels is presented. Potential applications for such channels include cooling of electronic circuits, and reactors for modification and separation of biological cells. The immediate goal is to determine at what length scales the continuum assumptions break down and if the Navier-Stokes equations adequately predict fluid behavior. In order to accomplish this, experiments are being conducted in progressively thinner flow channels. We have constructed three channels of rectangular cross-section ranging in area from 7200 to 80 square microns, utilizing the recent advances in microfabrication. In this paper, preliminary results are reported pertaining to friction measurements. It is found that in the relatively large flow channels the experimental observations are in rough agreement with the predictions from the Navier-Stokes equations. However, in the smallest of the channels, there is a significant deviation from the Navier-Stokes predictions. © 1990.
引用
收藏
页码:431 / 434
页数:4
相关论文
共 14 条
[1]   MICROCONTINUUM FLUID MECHANICS - REVIEW [J].
ARIMAN, T ;
TURK, MA ;
SYLVESTER, ND .
INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE, 1973, 11 (08) :905-930
[2]   APPLICATIONS OF MICROCONTINUUM FLUID MECHANICS [J].
ARIMAN, T ;
TURK, MA ;
SYLVESTER, ND .
INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE, 1974, 12 (04) :273-293
[3]  
Eringen A.C., 1964, J ENG SCI, V2, P205, DOI DOI 10.1016/0020-7225(64)90005-9
[4]  
Eringen A.C., 1964, INT J ENG SCI, V2, P189, DOI [DOI 10.1016/0020-7225(64)90004-7, 10.1016/0020-7225(64)90004-7]]
[5]  
ERINGEN AC, 1966, J MATH MECH, V16, P1
[6]  
Knudsen James George, 1958, CHEM ENG SERIES
[7]   SILICON AS A MECHANICAL MATERIAL [J].
PETERSEN, KE .
PROCEEDINGS OF THE IEEE, 1982, 70 (05) :420-457
[8]  
Platten J. K., 1984, CONVECTION LIQUIDS
[9]  
Shah R, 1978, LAMINAR FLOW FORCED, DOI 10.1016/C2013-0-06152-X
[10]   HIGH-PERFORMANCE HEAT SINKING FOR VLSI [J].
TUCKERMAN, DB ;
PEASE, RFW .
ELECTRON DEVICE LETTERS, 1981, 2 (05) :126-129