GROWTH OF (111)CDTE ON GAAS/SI AND SI SUBSTRATES FOR HGCDTE EPITAXY

被引:32
作者
KORENSTEIN, R
MADISON, P
HALLOCK, P
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 04期
关键词
D O I
10.1116/1.585870
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
(111) CdTe has been grown on both GaAs/Si and Si by hot wall epitaxy. X-ray diffraction, photoluminescence, and defect etching indicate that these layers are of high crystalline quality. For CdTe grown on GaAs/Si, full width at half-maximum of x-ray rocking curves as low as 59 arcsec have been obtained whereas for CdTe grown on Si, x-ray linewidths as narrow as 315 arcsec have been obtained. HgCdTe grown on (111)B CdTe/GaAs/Si by metalorganic chemical vapor deposition is very smooth and devoid of the many defects that plague other orientations.
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页码:1370 / 1375
页数:6
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