MASS-SEPARATED NEGATIVE-ION-BEAM DEPOSITION SYSTEM

[1] Alton G. D., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P85

[2] DESIGN-FEATURES AND FOCAL PROPERTIES OF SIMPLE 3 ELEMENT 2-DIMENSIONAL OR 3-DIMENSIONAL LENS SYSTEMS FOR DECELERATING INTENSE ION-BEAMS TO VERY LOW ENERGIES [J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 177 (2-3): : 273 - 280

[3] PIG SPUTTER SOURCE FOR NEGATIVE-IONS [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1975, NS22 (03) : 1632 - 1636

[4] ION-BEAM STUDIES .1. RETARDATION OF ION-BEAMS TO VERY LOW ENERGIES IN AN IMPLANTATION ACCELERATOR [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 135 (01): : 1 - 11

[5] TECHNOLOGY AND APPLICATIONS OF BROAD-BEAM ION SOURCES USED IN SPUTTERING .2. APPLICATIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03): : 737 - 756

[6] MECHANISM FOR NEGATIVE-ION PRODUCTION IN SURFACE-PLASMA NEGATIVE-HYDROGEN-ION SOURCE [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) : 3888 - 3896

[7] NEUTRAL AND IONIZED ALKALINE METAL BOMBARDMENT TYPE HEAVY NEGATIVE-ION SOURCE (NIABNIS) [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) : 186 - 195

[8] AXIAL MAGNETIC-FIELD EXTRACTION-TYPE MICROWAVE ION-SOURCE WITH A PERMANENT-MAGNET [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (04) : 449 - 456

[9] Ishikawa J., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P131

[10] CLOSE TO UNIVERSAL NEGATIVE-ION SOURCE [J]. NUCLEAR INSTRUMENTS & METHODS, 1974, 118 (02): : 329 - 336

[1] Alton G. D., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P85

[2] DESIGN-FEATURES AND FOCAL PROPERTIES OF SIMPLE 3 ELEMENT 2-DIMENSIONAL OR 3-DIMENSIONAL LENS SYSTEMS FOR DECELERATING INTENSE ION-BEAMS TO VERY LOW ENERGIES [J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 177 (2-3): : 273 - 280

[3] PIG SPUTTER SOURCE FOR NEGATIVE-IONS [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1975, NS22 (03) : 1632 - 1636

[4] ION-BEAM STUDIES .1. RETARDATION OF ION-BEAMS TO VERY LOW ENERGIES IN AN IMPLANTATION ACCELERATOR [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 135 (01): : 1 - 11

[5] TECHNOLOGY AND APPLICATIONS OF BROAD-BEAM ION SOURCES USED IN SPUTTERING .2. APPLICATIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03): : 737 - 756

[6] MECHANISM FOR NEGATIVE-ION PRODUCTION IN SURFACE-PLASMA NEGATIVE-HYDROGEN-ION SOURCE [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) : 3888 - 3896

[7] NEUTRAL AND IONIZED ALKALINE METAL BOMBARDMENT TYPE HEAVY NEGATIVE-ION SOURCE (NIABNIS) [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) : 186 - 195

[8] AXIAL MAGNETIC-FIELD EXTRACTION-TYPE MICROWAVE ION-SOURCE WITH A PERMANENT-MAGNET [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (04) : 449 - 456

[9] Ishikawa J., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P131

[10] CLOSE TO UNIVERSAL NEGATIVE-ION SOURCE [J]. NUCLEAR INSTRUMENTS & METHODS, 1974, 118 (02): : 329 - 336