CONDUCTION BAND-STRUCTURE IN STRAINED SILICON BY SPATIALLY-RESOLVED ELECTRON-ENERGY-LOSS SPECTROSCOPY

被引：19

作者：

BATSON, PE

机构：

[1] IBM Thomas J. Watson Research Center, Yorktown Heights

来源：

ULTRAMICROSCOPY | 1995年 / 59卷 / 1-4期

关键词：

D O I：

10.1016/0304-3991(95)00018-V

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Silicon 2p core absorption near edge fine structure has been obtained by spatially resolved electron energy loss spectroscopy in strained silicon quantum wells. Extraction of the heterojunction band offset as a function of position in the wells appears to be possible with some caution. The band offset has been correlated with atomic composition using annular dark field, Z-contrast imaging. The results suggest that the poor electron mobility, found in one of the wells by standard electrical measurements, resulted from poor carrier screening in the presence of a heterojunction band offset which varied by as much as 50 meV from place to place within the well.

引用

收藏

页码：63 / 70

页数：8

相关论文

共 12 条

[1] DISTORTION OF THE CORE EXCITON BY THE SWIFT ELECTRON AND PLASMON WAKE IN SPATIALLY RESOLVED ELECTRON-ENERGY-LOSS SCATTERING [J].

BATSON, PE .

PHYSICAL REVIEW B, 1993, 47 (12) :6898-6910

[2] HIGH-ENERGY RESOLUTION ELECTRON SPECTROMETER FOR 1-NM SPATIAL-ANALYSIS [J].

BATSON, PE .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (01) :43-48

[3] CONDUCTION-BAND STRUCTURE OF GEXSI1-X USING SPATIALLY RESOLVED ELECTRON ENERGY-LOSS SCATTERING [J].

BATSON, PE ;

MORAR, JF .

APPLIED PHYSICS LETTERS, 1991, 59 (25) :3285-3287

[4] PARALLEL DETECTION FOR HIGH-RESOLUTION ELECTRON-ENERGY LOSS STUDIES IN THE SCANNING-TRANSMISSION ELECTRON-MICROSCOPE [J].

BATSON, PE .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (07) :1132-1138

[5] THE IBM COMPUTER - STEM SYSTEM [J].

BATSON, PE ;

TRAFAS, G .

ULTRAMICROSCOPY, 1982, 8 (03) :293-300

[6] RESOLUTION ENHANCEMENT BY DECONVOLUTION USING A FIELD-EMISSION SOURCE IN ELECTRON-ENERGY LOSS SPECTROSCOPY [J].

BATSON, PE ;

JOHNSON, DW ;

SPENCE, JCH .

ULTRAMICROSCOPY, 1992, 41 (1-3) :137-145

[7] DYNAMIC SCREENING OF THE CORE EXCITON BY SWIFT ELECTRONS IN ELECTRON-ENERGY-LOSS SCATTERING [J].

BATSON, PE ;

BRULEY, J .

PHYSICAL REVIEW LETTERS, 1991, 67 (03) :350-353

[8] ELECTRON-TRANSPORT PROPERTIES OF SI/SIGE HETEROSTRUCTURES - MEASUREMENTS AND DEVICE IMPLICATIONS [J].

ISMAIL, K ;

NELSON, SF ;

CHU, JO ;

MEYERSON, BS .

APPLIED PHYSICS LETTERS, 1993, 63 (05) :660-662

[9] HETEROJUNCTION BAND LINEUPS IN SI-GE ALLOYS USING SPATIALLY RESOLVED ELECTRON-ENERGY-LOSS SPECTROSCOPY [J].

MORAR, JF ;

BATSON, PE ;

TERSOFF, J .

PHYSICAL REVIEW B, 1993, 47 (07) :4107-4110

[10] QUANTITATIVE DATA-PROCESSING OF PARALLEL RECORDED ELECTRON ENERGY-LOSS SPECTRA WITH LOW SIGNAL TO BACKGROUND [J].

SHUMAN, H ;

KRUIT, P .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (02) :231-239