SPECIMEN DAMAGE BY NUCLEAR MICROBEAMS AND ITS AVOIDANCE

被引:61
作者
COOKSON, JA
机构
[1] Harwell Lab, Didcot, Engl, Harwell Lab, Didcot, Engl
关键词
ION BEAMS - SPUTTERING;
D O I
10.1016/0168-583X(88)90020-1
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
As attempts are made to produce smaller and more intense nuclear microbeams the problems of specimen damage become more important. A summary of current knowledge is given for the damage mechanisms: sputtering, elemental migration, heating and atomic displacement. The effects of changing experimental conditions on the degree of damage are discussed and means of minimizing the effects are described.
引用
收藏
页码:324 / 330
页数:7
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