QUANTITATIVE INFRARED STUDY OF ULTRATHIN MIS STRUCTURES BY GRAZING INTERNAL-REFLECTION

被引:26
作者
BRENDEL, R
机构
[1] Institut für Werkstoffwissenschaften VI, Universität Erlangen-Nürnberg, Erlangen, D-8520
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1990年 / 50卷 / 06期
关键词
73.40; 77.55; 78.20;
D O I
10.1007/BF00323452
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A very sensitive reflection technique well suited for infrared investigations of thin MIS structures is introduced. With this technique a nearly saturating reflectance drop from the Si-O vibration of a 1.3 nm oxide on silicon within a MIS structure was measured at 1240 cm-1. The analytic discussion of the sensitivity amplification of this technique shows that for silicon oxide a sensitivity amplification by a factor of 600 per reflection is feasible over the sensitivity of a transmission measurement. The analytic discussion is verified experimentally for the case of 12 nm silicon nitride film. A method that allows one to determine bond concentrations of thin films within MIS structures is given and tested for the case of hydrogen bonds in silicon nitride. © 1990 Springer-Verlag.
引用
收藏
页码:587 / 593
页数:7
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