SPUTTERED TIN THIN-FILMS FOR IMPROVED CORROSION-RESISTANCE

被引：16

作者：

BHARDWAJ, P ^{[1
]}

GREGORY, OJ ^{[1
]}

BRAGGA, K ^{[1
]}

RICHMAN, MH ^{[1
]}

机构：

[1] BROWN UNIV,DIV ENGN,PROVIDENCE,RI 02912

来源：

APPLIED SURFACE SCIENCE | 1991年 / 48-9卷

关键词：

D O I：

10.1016/0169-4332(91)90390-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The general corrosion characteristics of TiN thin films deposited onto type 304 and 316 stainless steel by RF sputtering from a compound TiN target was investigated. In general, TiN film morphology and stoichiometry can vary considerably from film to film depending on deposition parameters and thus can play a major role in the corrosion behaviors of these films. Parametric models of the sputtering process were developed using statistical methods for design and analysis and studying the influence of a combination of variables on the properties of the TiN. The process parameters included RF power, N2 partial pressure, total gas pressure, substrate temperature and bias. A number of optimum conditions based on different responses were selected and corrosion testing of these films was carried out potentiostatically in 0.1N HCl and 0.1M NaCl solutions at 25-degrees-C.

引用

页码：555 / 566

页数：12

共 14 条

[1] THE INFLUENCE OF THE TIN DEPOSITION TEMPERATURE ON THE CRITICAL LOAD AND HARDNESS OF HARDENED STEELS [J].

ALJAROUDI, MY ;

HENTZELL, HGT ;

VALLI, J .

THIN SOLID FILMS, 1987, 154 (1-2) :425-429

[2]

ARAL T, 1987, THIN SOLID FILMS, V154, P387

[3] CHARACTERIZATION OF TITANIUM NITRIDE FILMS SPUTTER DEPOSITED FROM A HIGH-PURITY TITANIUM NITRIDE TARGET [J].

BRAT, T ;

PARIKH, N ;

TSAI, NS ;

SINHA, AK ;

POOLE, J ;

WICKERSHAM, C .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (06) :1741-1747

[4] THE RELATIONSHIP BETWEEN HARDNESS AND SCRATCH ADHESION [J].

BURNETT, PJ ;

RICKERBY, DS .

THIN SOLID FILMS, 1987, 154 (1-2) :403-416

[5]

DESCHEPPER L, 1988, THIN SOLID FILMS, V158, P199

[6] A STUDY OF THE CORROSION BEHAVIOR OF TIN FILMS [J].

ERDEMIR, A ;

CARTER, WB ;

HOCHMAN, RF ;

MELETIS, EI .

MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :89-93

[7]

JENKINS MW, 1986, SOLID STATE TECHNOL, P175

[8]

MARTIN PJ, 1982, J VAC SCI TECHNOL, P359

[9]

MELETIS EI, 1988, J MATER ENG, V11, P159

[10]

MELETIS EL, 1987, J MET, P25

← 1 2 →