ELECTROCHEMICHROMISM OF RF REACTIVELY SPUTTERED TUNGSTEN-OXIDE FILMS

被引：35

作者：

KANEKO, H

MIYAKE, K

TERAMOTO, Y

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 06期

关键词：

D O I：

10.1063/1.331225

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：4416 / 4421

页数：6

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共 23 条

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