MATERIALS FOR SUPERCONDUCTING ELECTRONICS - IN-SITU GROWTH OF PRGAO3 THIN-FILMS BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION

被引：9

作者：

HAN, B ^{[1
]}

NEUMAYER, DA ^{[1
]}

SCHULZ, DL ^{[1
]}

HINDS, BJ ^{[1
]}

MARKS, TJ ^{[1
]}

机构：

[1] NORTHWESTERN UNIV,TECHNOL CTR SUPERCONDUCT,EVANSTON,IL 60208

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 04期

关键词：

D O I：

10.1116/1.578568

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Phase-pure thin films of the YBCO, BSCCO, TBCCO lattice-matched and low dielectric-loss perovskite insulator PrGaO3 have been grown in situ on single-crystal (110) LaAlO3, (001) SrTiO3, and (001) MgO substrates by metalorganic chemical vapor deposition (MOCVD). Films were grown at temperatures between 750 and 800-degrees-C using the volatile metalorganic beta-diketonate precursors M(dpm)3 (M = Pr, Ga, and dpm = dipivaloylmethanate). As assessed by x-ray diffraction, the films grow epitaxially on LaAlO3 and SrTiO3 substrates with a high degree of (001) and/or (110) plane orientation parallel to the substrate surface. The films grown on MgO substrates are polycrystalline. Scanning electron microscopy reveals that the MOCVD-derived PrGaO3 films have smooth, featureless surfaces on all three kinds of substrates.

引用

页码：1431 / 1434

页数：4

共 26 条

[1] VOLATILE BARIUM BETA-DIKETONATE POLYETHER ADDUCTS - SYNTHESIS, CHARACTERIZATION, AND METALLOORGANIC CHEMICAL VAPOR-DEPOSITION [J].

GARDINER, R ;

BROWN, DW ;

KIRLIN, PS ;

RHEINGOLD, AL .

CHEMISTRY OF MATERIALS, 1991, 3 (06) :1053-1059

[2] CRYSTALLOGRAPHIC STUDIES OF PEROVSKITE-LIKE COMPOUNDS .2. RARE EARTH ALUMINATES [J].

GELLER, S ;

BALA, VB .

ACTA CRYSTALLOGRAPHICA, 1956, 9 (11) :1019-1025

[3] INSITU GROWTH OF EPITAXIAL YALO3 THIN-FILMS BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION [J].

HAN, B ;

NEUMAYER, DA ;

SCHULZ, DL ;

HINDS, BJ ;

MARKS, TJ ;

ZHANG, H ;

DRAVID, VP .

CHEMISTRY OF MATERIALS, 1993, 5 (01) :14-16

[4] METALORGANIC CHEMICAL VAPOR-DEPOSITION ROUTE TO EPITAXIAL NEODYMIUM GALLATE THIN-FILMS [J].

HAN, B ;

NEUMAYER, D ;

SCHULZ, DL ;

MARKS, TJ ;

ZHANG, H ;

DRAVID, VP .

APPLIED PHYSICS LETTERS, 1992, 61 (25) :3047-3049

[5] MOCVD SUPERCONDUCTING OXIDE-FILMS [J].

HIRAI, T ;

YAMANE, H .

JOURNAL OF CRYSTAL GROWTH, 1991, 107 (1-4) :683-691

[6]

HONSTU S, 1991, APPL PHYS LETT, V59, P2886

[7] PHASE-SELECTIVE ROUTE TO HIGH T(C)-SUPERCONDUCTING TL2BA2CAN-1CUNO2N+4 FILMS - COMBINED METALORGANIC CHEMICAL VAPOR-DEPOSITION USING AN IMPROVED BARIUM PRECURSOR AND STOICHIOMETRY-CONTROLLED THALLIUM VAPOR DIFFUSION [J].

MALANDRINO, G ;

RICHESON, DS ;

MARKS, TJ ;

DEGROOT, DC ;

SCHINDLER, JL ;

KANNEWURF, CR .

APPLIED PHYSICS LETTERS, 1991, 58 (02) :182-184

[8] RARE EARTH ORTHOGALLATES [J].

MAREZIO, M ;

REMEIKA, JP ;

DERNIER, PD .

INORGANIC CHEMISTRY, 1968, 7 (07) :1337-&

[9] ALKOXYALKYL-SUBSTITUTED BETA-DIKETONATE COMPLEXES OF BARIUM AND COPPER - EVIDENCE FOR INTERMOLECULAR AND INTRAMOLECULAR STABILIZATION [J].

REES, WS ;

CABALLERO, CR ;

HESSE, W .

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION IN ENGLISH, 1992, 31 (06) :735-737

[10] ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION ROUTES TO HIGH-TC SUPERCONDUCTING TL-BA-CA-CU-O FILMS [J].

RICHESON, DS ;

TONGE, LM ;

ZHAO, J ;

ZHANG, JM ;

MARCY, HO ;

MARKS, TJ ;

WESSELS, BW ;

KANNEWURF, CR .

APPLIED PHYSICS LETTERS, 1989, 54 (21) :2154-2156

← 1 2 3 →