INVESTIGATIONS ON SOLID-STATE REACTIONS BETWEEN TANTALUM THIN-FILMS AND OXIDIZED SILICON-CRYSTALS

被引：8

作者：

CHEN, JR

LIAUH, HR

LIU, YC

YEH, FS

机构：

[1] NATL TSING HUA UNIV,DEPT PHYS,HSINCHU 300,TAIWAN

[2] NATL TSING HUA UNIV,DEPT ELECT ENGN,HSINCHU 300,TAIWAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.571959

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：570 / 573

页数：4

共 7 条

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CHEN, JR ;

SUNG, CP ;

YEH, FS ;

LIU, YC ;

WANG, CC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :804-806

[2]

CHEN JR, 1982, SPR EL SOC M EL SOC, V82, P305

[3] BACKSCATTERING ANALYSIS OF THE SUCCESSIVE LAYER STRUCTURES OF TITANIUM SILICIDES [J].

MAA, JS ;

LIN, CJ ;

LIU, JH ;

LIU, YC .

THIN SOLID FILMS, 1979, 64 (03) :439-444

[4] REACTION OF THIN METAL-FILMS WITH SIO2 SUBSTRATES [J].

PRETORIUS, R ;

HARRIS, JM ;

NICOLET, MA .

SOLID-STATE ELECTRONICS, 1978, 21 (04) :667-&

[5] STABILITY OF SOLID PHASES IN THE TERNARY SYSTEMS OF SILICON AND CARBON WITH RHENIUM AND THE 6 PLATINUM METALS [J].

SEARCY, AW ;

FINNIE, LN .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1962, 45 (06) :268-273

[6]

WEAST RC, 1971, HDB CHEM PHYSICS

[7]

JANAF THERMOCHEMICAL, V37

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