STRUCTURAL STUDY OF THE DIAMOND PHASE CARBON-FILMS PRODUCED BY IONIZED DEPOSITION

被引：40

作者：

NAMBA, Y

MORI, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 02期

关键词：

D O I：

10.1116/1.573258

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

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页码：319 / 323

页数：5

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