PREPARATION AND STRUCTURE OF CARBON-FILM DEPOSITED BY A MASS-SEPARATED C+ ION-BEAM

被引：139

作者：

MIYAZAWA, T

MISAWA, S

YOSHIDA, S

GONDA, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 01期

关键词：

D O I：

10.1063/1.332862

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：188 / 193

页数：6

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