MEASUREMENT OF HUMIDITY USING SURFACE ACOUSTIC-WAVE DEVICE

被引：9

作者：

NOMURA, T ^{[1
]}

OOBUCHI, K ^{[1
]}

YASUDA, T ^{[1
]}

FURUKAWA, S ^{[1
]}

机构：

[1] KYUSHU INST TECHNOL,DEPT COMP SCI & ELECTR,IIZUKA,FUKUOKA 820,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 9B期

关键词：

SURFACE ACOUSTIC WAVE; SAW DELAY LINE; SAW SENSOR; HUMIDITY MEASUREMENT; CONDUCTIVE HYGROSCOPIC POLYMER;

D O I：

10.1143/JJAP.31.3070

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A surface acoustic wave (SAW) sensor utilizing the acoustoelectric effect has been designed for measurement of humidity in sensing ambient atmosphere. Most of the studies reported on sensors utilize the effect of mass loading. In this paper, we propose a somewhat different SAW humidity sensor that uses the changes in the film conductivity rather than the mass. A 30 MHz dual SAW delay line fabricated on 128-degrees YX LiNbO3 was coated with the sodium salt of poly(styrene) sulfonate. This hygroscopic polymer coating caused the SAW velocity change of 10 m/s per 10% relative humidity. The response was quite linear in the range from 20 to 70%RH.

引用

页码：3070 / 3072

页数：3