PARTICLE-PLASMA INTERACTIONS IN LOW-PRESSURE DISCHARGES

被引：60

作者：

JELLUM, GM

GRAVES, DB

机构：

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 20期

关键词：

D O I：

10.1063/1.103946

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Spatial profiles of size and number density of aluminum particles in argon plasmas have been measured. Angular dissymmetry laser light scattering indicates that larger particles tend to segregate towards the anodic plasma-sheath boundary; however, the larger particles (≳400 nm diameter) near this boundary are present in number densities lower than those closer to the center of the discharge, where particles are smaller (∼300 nm). Nonspherical particle aggregates appear to form near the plasma-sheath interface under some conditions. Optical emission intensity and positive ion number density are reduced in discharges with particles as compared to discharges without particles.

引用

页码：2077 / 2079

页数：3

共 20 条

[1]

ANDERSON H, 1989, AM CERAM SOC BULL, V68, P996

[2] ALTERNATIVE APPROACH TO NANOCOMPOSITE SYNTHESIS BY SPUTTERING [J].