GLOW-DISCHARGE SYNTHESIS OF SILICON-NITRIDE PRECURSOR POWDERS

被引：40

作者：

HO, P

BUSS, RJ

LOEHMAN, RE

机构：

来源：

JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 04期

关键词：

D O I：

10.1557/JMR.1989.0873

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：873 / 881

页数：9

共 29 条

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