OPTICAL DIAGNOSTICS OF LOW-PRESSURE PLASMAS

被引：78

作者：

DREYFUS, RW ^{[1
]}

JASINSKI, JM ^{[1
]}

WALKUP, RE ^{[1
]}

SELWYN, GS ^{[1
]}

机构：

[1] IBM CORP,E FISHKILL DEV LAB,HOPEWELL JUNCTION,NY 12533

来源：

PURE AND APPLIED CHEMISTRY | 1985年 / 57卷 / 09期

关键词：

D O I：

10.1351/pac198557091265

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：1265 / 1276

页数：12

共 60 条

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[6] MEASUREMENT OF ATOMIC-HYDROGEN DENSITIES AND VELOCITIES BY LASER-INDUCED FLUORESCENCE AT L-ALPHA
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[7] 2-PHOTON EXCITATION OF THE N = 3 LEVEL IN H-ATOM AND D-ATOM
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[J]. PHYSICAL REVIEW A, 1981, 24 (01): : 612 - 614
[8] 2-PHOTON INDUCED FLUORESCENCE AND RESONANCE-ENHANCED IONIZATION OF SULFUR-ATOMS
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[J]. CHEMICAL PHYSICS LETTERS, 1982, 91 (02) : 126 - 129
[9] OPTICAL-EMISSION SPECTROSCOPY OF REACTIVE PLASMAS - A METHOD FOR CORRELATING EMISSION INTENSITIES TO REACTIVE PARTICLE DENSITY
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[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) : 3134 - 3136
[10] d'Agostino R., 1984, Plasma Chemistry and Plasma Processing, V4, P165, DOI 10.1007/BF00566839

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