OPTICAL DIAGNOSTICS OF LOW-PRESSURE PLASMAS

被引：78

作者：

DREYFUS, RW ^{[1
]}

JASINSKI, JM ^{[1
]}

WALKUP, RE ^{[1
]}

SELWYN, GS ^{[1
]}

机构：

[1] IBM CORP,E FISHKILL DEV LAB,HOPEWELL JUNCTION,NY 12533

来源：

PURE AND APPLIED CHEMISTRY | 1985年 / 57卷 / 09期

关键词：

D O I：

10.1351/pac198557091265

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：1265 / 1276

页数：12

共 60 条

[31] ENHANCED PRODUCTION OF TUNABLE VUV RADIATION BY PHASE-MATCHED FREQUENCY TRIPLING IN KRYPTON AND XENON
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[J]. CHEMICAL PHYSICS LETTERS, 1984, 105 (06) : 641 - 644
[34] DETECTION OF SIH2 IN SILANE AND DISILANE GLOW-DISCHARGES BY FREQUENCY-MODULATION ABSORPTION-SPECTROSCOPY
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[J]. APPLIED PHYSICS LETTERS, 1984, 44 (12) : 1155 - 1157
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[36] PHOTODETACHMENT THRESHOLD OF CN- BY LASER OPTOGALVANIC SPECTROSCOPY
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[J]. CHEMICAL PHYSICS LETTERS, 1983, 100 (06) : 475 - 478
[37] HIGH-RESOLUTION ABSORPTION AND EMISSION-SPECTROSCOPY OF A SILANE PLASMA IN THE 1800-2300 CM-1 RANGE
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[J]. JOURNAL OF CHEMICAL PHYSICS, 1982, 76 (07) : 3414 - 3421
[38] DISSOCIATIVE EXCITATION OF SOME OXYGEN-CONTAINING MOLECULES - LIFETIMES AND ELECTRON-IMPACT CROSS SECTIONS
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[J]. PHYSICAL REVIEW A, 1970, 2 (02): : 397 - &
[39] LIF AND OES DETECTION OF RADICAL SPECIES IN SIF-4 + H-2 PLASMAS
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[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 66 (1-2) : 39 - 43
[40] LASER-INDUCED FLUORESCENCE OF THE HSIF RADICAL
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[J]. CHEMICAL PHYSICS LETTERS, 1983, 99 (5-6) : 394 - 398

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