INTERFACE STRUCTURE OF ZNS/SI(001) AND COMPARISON WITH ZNSE/SI(001) AND GAAS/SI(001)

被引:51
作者
ROMANO, LT [1 ]
BRINGANS, RD [1 ]
ZHOU, X [1 ]
KIRK, WP [1 ]
机构
[1] TEXAS A&M UNIV,CTR NANOSTRUCT MAT & QUANTUM DEVICE FABRICAT,COLLEGE STN,TX 77843
来源
PHYSICAL REVIEW B | 1995年 / 52卷 / 15期
关键词
D O I
10.1103/PhysRevB.52.11201
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The interface between ZnS and Si(001) has been studied with transmission electron microscopy. It was found that stacking faults were the dominant microstructural defect in the ZnS films. Higher-quality interfaces and better ZnS films were obtained when arsenic-terminated Si(001) surfaces were used as the substrate. It was also found that the stacking fault density was much lower and qualitatively different than for interfaces formed without an As monolayer. Stacking faults in only one of the two possible orientations were observed for ZnS grown on non-As-terminated Si(001). These results are compared with those for ZnSe on Si and GaAs on Si and it is concluded that lattice match does not play as large a role as does chemical compatability at the interface.
引用
收藏
页码:11201 / 11205
页数:5
相关论文
共 18 条
[1]   EFFECT OF INTERFACE CHEMISTRY ON THE GROWTH OF ZNSE ON THE SI(100) SURFACE [J].
BRINGANS, RD ;
BIEGELSEN, DK ;
SWARTZ, LE ;
PONCE, FA ;
TRAMONTANA, JC .
PHYSICAL REVIEW B, 1992, 45 (23) :13400-13406
[2]   ATOMIC-STEP REARRANGEMENT ON SI(100) BY INTERACTION WITH ARSENIC AND THE IMPLICATION FOR GAAS-ON-SI EPITAXY [J].
BRINGANS, RD ;
BIEGELSEN, DK ;
SWARTZ, LE .
PHYSICAL REVIEW B, 1991, 44 (07) :3054-3063
[3]  
CHADI DJ, UNPUB
[4]   THE FORMATION MECHANISM OF PLANAR DEFECTS IN COMPOUND SEMICONDUCTORS GROWN EPITAXIALLY ON (100) SILICON SUBSTRATES [J].
ERNST, F ;
PIROUZ, P .
JOURNAL OF MATERIALS RESEARCH, 1989, 4 (04) :834-842
[5]   STRAIN AND MISORIENTATION IN GAAS GROWN ON SI(001) BY ORGANOMETALLIC EPITAXY [J].
GHANDHI, SK ;
AYERS, JE .
APPLIED PHYSICS LETTERS, 1988, 53 (13) :1204-1206
[6]   GROWTH AND STRUCTURE OF EPITAXIAL-FILMS AND HETEROJUNCTIONS OF II-VI COMPOUNDS [J].
HOLT, DB .
THIN SOLID FILMS, 1974, 24 (01) :1-53
[7]   ON EPILAYER TILT IN ZNSE/GE HETEROSTRUCTURES PREPARED BY MOLECULAR-BEAM EPITAXY [J].
KLEIMAN, J ;
PARK, RM ;
MAR, HA .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (03) :1201-1205
[8]  
KNALL J, UNPUB
[9]   SOME OPTICAL AND ELECTRON-MICROSCOPE COMPARATIVE-STUDIES OF EXCIMER LASER-ASSISTED AND NONASSISTED MOLECULAR-BEAM EPITAXIALLY GROWN THIN GAAS FILMS ON SI [J].
LAO, P ;
TANG, WC ;
RAJKUMAR, KC ;
GUHA, S ;
MADHUKAR, A ;
LIU, JK ;
GRUNTHANER, FJ .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (10) :6445-6453
[10]  
Lee J.W., 1987, MATER RES SOC S P, V91, P33