共 46 条
[1]
Banks R.E., 1970, FLUOROCARBONS THEIR
[3]
BEVAN WI, 1961, CHEM IND-LONDON, P789
[4]
METHODS IN SEMICONDUCTOR SURFACE-CHEMISTRY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (01)
:1-8
[5]
DESIGN CONSIDERATIONS FOR SIMPLE GAS DOSERS IN SURFACE SCIENCE APPLICATIONS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1985, 3 (02)
:408-411
[6]
CARRE DJ, 1986, ASLE TRANS, V29, P121