THERMOPLASTIC DEFORMATION OF SILICON-WAFERS

被引：25

作者：

WIDMER, AE

REHWALD, W

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 11期

关键词：

D O I：

10.1149/1.2108417

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2403 / 2409

页数：7

共 18 条

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